You are given an array of $n$ integers. Your task is to calculate the number of non-empty subsets whose elements' bitwise and is equal to $k$ for each $k = 0, 1,\dots, n$ .

The first line has an integer $n$ : the size of the array.

The next line has $n$ integers $a_1, a_2,\dots, a_n$ : the contents of the array.

• $1 \le n \le 2 \cdot 10^5$
• $0 \le a_i \le n$

Print $n + 1$ integers as specified above modulo $10^9 + 7$ .